 DescriptionCompact, practical design offering all necessary The AL Series programmable wafer handlers are cost-effective and versatile, making them the clear choice when a programmable wafer handler is required to improve throughput. With a diversity of inspection modes, such as sequential sampling and micro/macro inspection of both front and back surfaces (including the ability to macro inspect the entire back surface of the wafer from 90° to 160°), the AL wafer handling systems are a reliable and efficient choice. A wide array of standard features include MX51/MX61/MX61L/MX80 integration, programmable inspection modes, non-contact wafer alignment, self-diagnostics and a stainless steel body for clean room compatibility. |
Features and Benefits
Standard Features
Multiple formats:Offers one-button switch over from 6” to 8” wafer configurations or between different cassette types.
Non-contact:
Provides non-contact optical wafer centering and notch detection
High-Throughput:
Offers a 20% throughput enhancement compared to AL100
Class 10 Compatible:
Includes stainless steel facade for clean room compatibility
System Integration:
Accommodates integration with a MX50 or MX80 via a manual or motorized shuttle stage for automated wafer inspections
100% Backside Inspection:
Includes a new second back surface macro feature that permits observations of the entire back surface of the wafer by rotating wafers after the first macro inspection— exposing the obstructions caused by the wafer-retaining tabs
Custom Cassette Options:
Accommodates wafer cassettes with 26 slots or other custom configurations available. Simple, Ergonomic Operation: Offers an optional remote control unit for close range fingertip operation
Wafer Protection:
Provides for the registration/display of defective wafers and detects mis-aligned wafers in cassettes
Ease of Use and Maintenance:
Includes self-diagnosis mode with digital error code display for ease of troubleshooting and maintainability