 DescriptionYou can perform inspection and analysis the way you want, by choosing either of the Dual-Engines of the MX61A.Performing multiple tasks in a variety of ways is fundamental to today’s semiconductor manufacturing environment. Based on the above concept, Olympus has developed a Dual-Engine solution - an Inspection-Engine and an Analysis-Engine - to provide flexibility to respond to future needs as they evolve. This will allow the automation of inspection/analysis in the semiconductor field to adapt to future needs over time. The Dual-Engines fully bring out the high-performance of the MX61A, and provide automation, to fit your needs, for both inspection and analysis. |
Features and Benefits
Inspection
The Inspection-Engine flexibly meets evolving inspection needs. What controls the entire MX61A system as an Inspection-Engine is the operation unit. The observation conditions can be called up through the operation unit at any time, and sharing among multiple operators (observers) is also possible. Auto focus compatible with a wide range of observation methods, and detailed customized settings, provide a higher level inspection environment. Operation unit (MX-OPU61A)OPERATOR screenNew operation unit
The operation unit provides three operation screens: OPERATOR,ENGINEER and FUNCTION screens. The OPERATOR screen is designed to enable the operator to perform efficient microscopic operations. On the ENGINEER screen, more advanced operations can be performed. On the FUNCTION screen, up to six observation condition settings are shown, and any of these complicated microscope operations can be brought up on the screen at a push of the corresponding button.
Optimum observation conditions
The aperture diaphragm (AS) works in interlock with objective magnification switching and observation method switching, the parfocality between objective lenses can be adjusted, the retardation position in DIC observations can be specified, and so forth. All these functional settings can be established on the operation unit. In addition, three USER settings can be stored in memory so that a multiple of operators (observers) can share them and use the one appropriate for a specific purpose in microscopy.